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http://mems.caltech.edu/


Caltech Micromachining Laboratory
The Caltech Micromachining Lab is headed by Prof. Yu-Chong Tai. Research in the lab includes MEMS technology, microsensors, microactuators, microstructure, MEMS systems, and MEMS science. The lab is a complete micromachining facility including a clean-room processing lab, a computer lab, and a measurement/testing lab. The facility is currently sponsoring more than 20 researchers (14 Ph.D.
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